![[ICO]](/icons/blank.gif){kind=icon}
![[PARENTDIR]](/icons/back.gif){kind=icon}
![[IMG]](/icons/image2.gif){kind=icon}
![[DIR]](/icons/folder.gif){kind=icon}
| Name | Last modified | Size | Description |
|---|---|---|---|---|
| Parent Directory | - | ||
| Chamber Liner.jpg | 2019-10-29 15:10 | 16K | |
| Edge Ring.jpg | 2019-10-29 15:11 | 13K | |
| 3-Focus Ring.jpg | 2019-10-31 09:23 | 15K | |
| 23-pin lift heater D..> | 2019-10-31 14:24 | 71K | |
| 1/ | 2021-09-03 13:34 | - | |
| 3/ | 2021-09-03 13:34 | - | |
| CeramicsQuartzParts/ | 2021-09-03 13:34 | - | |
| CVDSiC/ | 2021-09-03 13:34 | - | |
| ESC/ | 2021-09-03 13:34 | - | |
| Quartz Parts/ | 2021-09-03 13:34 | - | |
| Semiconductor Equipm..> | 2021-09-03 13:34 | - | |
| SiliconUpperElectrode/ | 2021-09-03 13:34 | - | |
| SpareParts/ | 2021-09-03 13:34 | - | |
| Test/ | 2021-09-03 13:34 | - | |