 |
|
High performance of etch resistance on thermal shock resistance and high energy plasma, applicable to RTP and etcher chamber parts.
| CVD SiC | Hot Pressed SiC | RB SiC | Sintered SiC | |
| Purity | 99.999%+ | 97-99.9%+ | 99%+ | 99 |
| Density (g cm-3) | 3.21 | 3.15-3.20 | 3.00-3.15 | 3.15 |
| Porosity | negligible | <1% | <1% | 1-2% |
| Thermal Conductivity (W m-1 K-1) | 250-300 | 100-180 | 100-150 | 100-140 |
| Coefficient of Thermal Expansion (°C-1) | 4.4 x 10-6 | 4.5 x 10-6 | 4.5 x 10-6 | 4.2 x 10-6 |
| Flexural Strength (103 psi) | 60-70 | 60-80 | 40-70 | 50-60 |
| Elastic Modulus (106 psi) | 65 | 65 | 65 | 60 |
302 新竹縣竹北市東興路一段769巷301號
TEL：+886-3-5921010
www.tpower.com.tw
 |
 |
