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About CVD SiC
關於CVD SiC

High performance of etch resistance on thermal shock resistance and high energy plasma, applicable to RTP and etcher chamber parts.

  CVD SiC Hot Pressed SiC RB SiC Sintered SiC
Purity 99.999%+ 97-99.9%+ 99%+ 99
Density (g cm-3) 3.21 3.15-3.20 3.00-3.15 3.15
Porosity negligible <1% <1% 1-2%
Thermal Conductivity (W m-1 K-1) 250-300 100-180 100-150 100-140
Coefficient of Thermal Expansion (°C-1) 4.4 x 10-6 4.5 x 10-6 4.5 x 10-6 4.2 x 10-6
Flexural Strength (103 psi) 60-70 60-80 40-70 50-60
Elastic Modulus (106 psi) 65 65 65 60

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